Dependence of Dissolution Kinetics of Main-Chain Scission Type Resists on Molecular Weight

The dissolution kinetics and molecular weight in main-chain scission type resists such as poly(methyl methacrylate) (PMMA) ZEP520A were investigated using a quartz crystal microbalance (QCM) method Gel Permeation Chromatography (GPC) to clarify the effects of after polymer degradation on kinetics. G-values main chain scissions PMMA are estimated GPC measurement. G-value showed higher than that PMMA. There three regions PMMA, whereas there only two ZEP 520A. behavior depends both These results indicate is better be lithographic performance.